E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0217 - Superseded SEMI D6 — Specification for

SEMI D6 — Specification for Liquid Crystal Display (LCD) Mask Substrates

reporting of the collection events are process module-specific to support the reporting of process module-specific data parameters

This marking symbol is marked in a manner and location to avoid affecting the user patterning process

This Document does not address the transmission

The data within scope of this Standard is any data that is retrievable from semiconductor equipment via electronic interfaces

E13800 - SEMI E138 - Specification for XML Semiconductor Common Components Revision:SEMI E138-0217 - Superseded SEMI D6 — Specification forThis Document is a central location for the definition of common XML elements that are not specific to a single standard, but common across multiple standards. This Document defines the representation of Error, Data Types, Data Value Types, and Unit which are considered common components. The common components are used in association with other XML documents or schemas generated as part of the XML based SEMI Standard Interface Specifications.